OMEGA FMA5400A ve FMA5500A Akış Kontrol cihazı
OMEGA FMA5400A/5500A Gaz Kütle Akış Kontrol Aygıtları
The FMA5400A/5500A mass flow controllers feature a built-in normally-closed electromagnetic valve for maintaining a constant flowrate regardless of variations in inlet or outlet pressures. The setpoint is controlled either locally via a potentiometer accessible through an access window in the case or remotely via an analog 0-5 Vdc or 4-20 mA signal (field selectable). The FMA5400A/5500A series require 12 to 26 Vdc power @ 800 mA maximum (12 to 15 Vdc sizes 43, 44 and 45 only), which can be supplied by the FMA545PW wall plug-in socket power supply. Model number FMA545C (supplied separately) provides a mating 15-pin "D” connector with 8 feet of shielded cable for accessing the analog output signals and power input connections. The LCD supplied with the FMA5500A series is connected to the lower electronics via a modular plug. The LCD can be remotely located by purchasing an FMA18RC remote cable assembly–you must then build your own assembly for panel mounting the LCD.
SPECIFICATIONS
Accuracy: ±1.5% FS, including linearity over 15 to 25°C (59 to 77°F) and
0.7 to 4.2 kg/cm² (10 to 60 psia) ±3% FS for units ≥ 100 SLM from o to 20% of range.
Repeatability: ±0.5% of full scale
Temp Coefficient: 0.15% FS/°C
Pressure Coefficient: 0.01% FS per psi (0.07 bar)
Maximum Pressure Drop: 50 psid
Response Time: 5 seconds to within ±2% of set flow rate over 25 to 100% FS
Max Gas Pressure: 70 kg/cm² gauge (1000 psig)(For units up to 100 SLM); 35 kg/cm² gauge (500 psig); 1.76 kg/cm (25 psig) optimum
Gas and Ambient Temp: 5 to 50°C (41 to 122°F)
Leak Integrity: 1 x 10-7 cc/sec of He max to outside environment
Materials in Fluid Contact:
Aluminum Models: Anodized aluminum, 316 SS, brass and FKM O-rings
Stainless Steel Models: 316 SS and FKM O-rings
Output Signal:
Linear 0 to 5 Vdc: 1000 Ω minimum load
4 to 20 mA: 50 to 500 Ω loop resistance, ±20 mV max noise
Transducer Power: 12 to 26 Vdc @ 800 mA
Turndown Ratio: 40:1
Shipping Weight: 1.8 kg (4 lb)
Compliance: EN55011 class 1, class B; EN50082-1
Attitude Sensitivity: With horizontal flow path, no shift in calibration up to +20 degree pitch
Gas Relative Humidity: 0 to 70% RH
Min Pressure Drop
SLM | ≤9 | 10-30 | 50 | 60-100 | 200 | 500 | 1000 |
psid | 1.1 | 3.9 | 8 | 18.9 | 10 | 12 |
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